AIR VOLUME ADJUSTMENT DAMPER, AIR VOLUME ADJUSTMENT DAMPER SYSTEM, LITHOGRAPHY DEVICE, AND PRODUCTION METHOD OF ARTICLE

• Main Author: SEKINE HIROKAZU
• Format: Patent
• Language: English; Japanese
• Published: 30.05.2016
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; BLASTING; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HEATING; HOLOGRAPHY; LIGHTING; MATERIALS THEREFOR; MECHANICAL ENGINEERING; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RANGES; SEMICONDUCTOR DEVICES; VENTILATING; WEAPONS

PROBLEM TO BE SOLVED: To provide an air volume adjustment damper that is advantageous in terms of a simple structure and space saving while enabling fine adjustment.SOLUTION: An air volume adjustment damper 24 adjusts an air volume by changing rotation angles of rotating plates, and comprises the fi...