AIR VOLUME ADJUSTMENT DAMPER, AIR VOLUME ADJUSTMENT DAMPER SYSTEM, LITHOGRAPHY DEVICE, AND PRODUCTION METHOD OF ARTICLE

• Main Author: SEKINE HIROKAZU
• Format: Patent
• Language: English; Japanese
• Published: 30.05.2016
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; BLASTING; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HEATING; HOLOGRAPHY; LIGHTING; MATERIALS THEREFOR; MECHANICAL ENGINEERING; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RANGES; SEMICONDUCTOR DEVICES; VENTILATING; WEAPONS

PROBLEM TO BE SOLVED: To provide an air volume adjustment damper that is advantageous in terms of a simple structure and space saving while enabling fine adjustment.SOLUTION: An air volume adjustment damper 24 adjusts an air volume by changing rotation angles of rotating plates, and comprises the first and second rotating plates 2 and 3 of which rotating shafts are located on the same straight line. The first and second rotating plates 2 and 3 are configured so as to be able to adjust the rotating angles individually.SELECTED DRAWING: Figure 1 【課題】微調整を可能としつつ、簡易的な構造かつ省スペースの点で有利な風量調整ダンパーを提供する。【解決手段】風量調整ダンパー２４は、回転板の回転角度を変化させて風量を調整するものであり、回転軸が同一直線上に位置する第１および第２の回転板２、３を備える。ここで、第１および第２の回転板２、３は、個別に回転角度を変化させることが可能に構成される。【選択図】図１