PRESSING DEVICE AND ARRANGING DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE DEVICE

PROBLEM TO BE SOLVED: To provide a pressing device capable of improving workability at an upper side of a substrate thereafter, relative to a pressing device having a pressing part for pressing the substrate to a stand from the upper side of the substrate.SOLUTION: A pressing device 60 comprises: a...

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Bibliographic Details
Main Authors MORIKAWA SHINGO, HORIUCHI TAKEYOSHI
Format Patent
LanguageEnglish
Japanese
Published 23.05.2016
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Summary:PROBLEM TO BE SOLVED: To provide a pressing device capable of improving workability at an upper side of a substrate thereafter, relative to a pressing device having a pressing part for pressing the substrate to a stand from the upper side of the substrate.SOLUTION: A pressing device 60 comprises: a stand 62 contacting with a lower surface of a substrate 10 and supporting the substrate 10; and a pressing part 64 contacting with the substrate 10 at a part 127b projecting from the lower side than the upper surface of the stand 62 and pressing the substrate 10 against the stand 62.SELECTED DRAWING: Figure 5 【課題】本発明は、基板の上側から基板を台に押し付ける押付部を備えた押付装置に比べて、基板の上側でのその後の作業性を向上させることができる押付装置を提供することを目的とする。【解決手段】押付装置60は、基板10の下面に接触して、基板10を支持する台62と、台62の上面よりも下側から突出した部位127Bで基板10に接触して、基板10を台62に押付ける押付部64と、を備えている。【選択図】図5
Bibliography:Application Number: JP20140223241