SEMICONDUCTOR LAMINATE, LIGHT RECEIVING ELEMENT AND SENSOR

PROBLEM TO BE SOLVED: To provide a semiconductor laminate, a light receiving element and a sensor, which are capable of improving sensitivity.SOLUTION: A semiconductor laminate 10 comprises: base layers 20, 30 each composed of a group III-V compound semiconductor and has n-type conductivity; a quant...

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Main Authors NISHIZUKA KOJI, SHIBATA KAORU, AKITA KATSUSHI, ARIKATA SUGURU, KYONO TAKASHI
Format Patent
LanguageEnglish
Japanese
Published 23.05.2016
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Summary:PROBLEM TO BE SOLVED: To provide a semiconductor laminate, a light receiving element and a sensor, which are capable of improving sensitivity.SOLUTION: A semiconductor laminate 10 comprises: base layers 20, 30 each composed of a group III-V compound semiconductor and has n-type conductivity; a quantum well structure 40 composed of a group III-V compound semiconductor; a diffusion block layer 60 which is composed of a group III-V compound semiconductor and has a thickness of 50 nm and over and a p-type impurity concentration equal to or lower than 1×10cm; and a contact layer 50 which is composed of a group III-V compound semiconductor and has p-type conductivity. The base layers 20, 30, the quantum we structure 40, the diffusion block layer 60 and the contact layer 50 are arranged by lamination of this order.SELECTED DRAWING: Figure 1 【課題】感度の向上を可能とする半導体積層体、受光素子およびセンサを提供する。【解決手段】半導体積層体10は、III−V族化合物半導体からなり、導電型がn型であるベース層20,30と、III−V族化合物半導体からなる量子井戸構造40と、III−V族化合物半導体からなり、厚みが50nm以上であり、p型不純物濃度が1×1016cm−3以下である拡散ブロック層60と、III−V族化合物半導体からなり、導電型がp型であるコンタクト層50と、を備える。ベース層20,30、量子井戸構造40、拡散ブロック層60およびコンタクト層50は、この順に積層して配置される。【選択図】図1
Bibliography:Application Number: JP20140220758