ORGANIC THIN FILM FORMATION APPARATUS

• Main Authors: KIYOTA JUNYA, NAKAMURA HISAMITSU, SAITO KAZUYA, ARAI MAKOTO, KURATA TAKAOMI
• Format: Patent
• Language: English; Japanese
• Published: 16.05.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a technique that allows a recovered organic material to be easily used.SOLUTION: Each of evaporation units 20a-20e is provided with two evaporation tanks 16and 16each having both a heating device 3or 3and a cooling device 4or 4. When the vapor of an organic material is generated by heating and released from a release device 15 with one evaporation tank 16or 16being connected to the release device 15, a tank wall of the other evaporation tank 16or 16is cooled. When the vapor release from the release device 15 is stopped, the evaporation tanks 16and 16are connected to each other, and the vapor generated in the one evaporation tank 16or 16is moved to the other evaporation tank 16or 16and cooled therein to precipitate the organic material. By heating the evaporation tank 16or 16where the precipitation has occurred, the vapor of the precipitated organic material is generated to be released from the release device 15.SELECTED DRAWING: Figure 2 【課題】回収した有機材料を簡単に使用できる技術を提供する。【解決手段】各蒸発ユニット２０ａ〜２０ｅに、加熱装置３1又は３2と冷却装置４1又は４2の両方を有する二台の蒸発槽１６1、１６2をそれぞれ設け、一方の蒸発槽１６1又は１６2を放出装置１５に接続して加熱によって有機材料の蒸気を生成して放出装置１５から放出させているときに、他方の蒸発槽１６1又は１６2では、蒸発槽１６1又は１６2の槽壁を冷却しておき、放出装置１５からの蒸気の放出を停止するときは、蒸発槽１６1、１６2同士を接続し、一方の蒸発槽１６1又は１６2で生成された蒸気を他方の蒸発槽１６1又は１６2に移動させ、冷却して有機材料を析出させる。析出した蒸発槽１６1又は１６2を加熱すると、析出した有機材料の蒸気が生成されるので、その蒸気を放出装置１５から放出させることができる。【選択図】図２