PRODUCTION METHOD OF MOLD, MOLD, PRODUCTION METHOD OF FILM, AND FILM

PROBLEM TO BE SOLVED: To provide a production method for obtaining a mold with fewer defects, by which aggregates in a resist liquid can be efficiently removed.SOLUTION: A production method of a mold is provided, including the following steps: step A of settling aggregates in a resist liquid by cent...

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Bibliographic Details
Main Authors YAMADA NAOKO, KOSHITOUGE HARUKI
Format Patent
LanguageEnglish
Japanese
Published 16.05.2016
Subjects
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