PRODUCTION METHOD OF MOLD, MOLD, PRODUCTION METHOD OF FILM, AND FILM
PROBLEM TO BE SOLVED: To provide a production method for obtaining a mold with fewer defects, by which aggregates in a resist liquid can be efficiently removed.SOLUTION: A production method of a mold is provided, including the following steps: step A of settling aggregates in a resist liquid by cent...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
16.05.2016
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Subjects | |
Online Access | Get full text |
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