OPTICAL IMAGING DEVICE AND METHOD

• Main Authors: GELLRICH BERNHARD, KUGLER JENS, HEMBACHER STEFAN
• Format: Patent
• Language: English; Japanese
• Published: 12.05.2016
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

PROBLEM TO BE SOLVED: To provide an optical imaging device and an optical imaging method technology for microlithography.SOLUTION: An optical imaging device comprises at least one optical element 109 and at least one holding device 104 connected to the optical element 109, wherein: the holding devic...