OPTICAL IMAGING DEVICE AND METHOD

• Main Authors: GELLRICH BERNHARD, KUGLER JENS, HEMBACHER STEFAN
• Format: Patent
• Language: English; Japanese
• Published: 12.05.2016
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

PROBLEM TO BE SOLVED: To provide an optical imaging device and an optical imaging method technology for microlithography.SOLUTION: An optical imaging device comprises at least one optical element 109 and at least one holding device 104 connected to the optical element 109, wherein: the holding device 104 holds the optical element 109; a first part 109.1 of the optical element 109 contacts a first atmosphere; and a second part 109.2 of the optical element 109 at least temporarily contacts a second atmosphere. There is provided a reduction device 115 at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.SELECTED DRAWING: Figure 2 【課題】マイクロリソグラフィのための光学撮像装置と光学撮像方法技術を提供する。【解決手段】少なくとも１つの光学素子１０９と、光学素子１０９に結合された少なくとも１つの保持装置１０４を備え、保持装置１０４は光学素子１０９を保持し、光学素子１０９の第１部分１０９.１は、第１雰囲気に接触し、光学素子１０９の第２部分１０９.２は、すくなくとも一時的には第２雰囲気に接触する。第１雰囲気と第２雰囲気間の圧力差における動的変動を少なくとも削減する削減装置１１５を備える。【選択図】図２