BOLOMETRIC DETECTOR HAVING MIM STRUCTURE OF DIFFERENT DIMENSIONS

• Main Authors: UJWOL PALANCHOKE, POCAS STEPHANE, SALIM BUTAMI, RABAUD WILFRIED
• Format: Patent
• Language: English; Japanese
• Published: 09.05.2016
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; TESTING

PROBLEM TO BE SOLVED: To propose a bolometric detector that has a large absorption effective area.SOLUTION: A bolometric detector of wavelengths in an LWIR range includes: a substrate; a membrane that is suspended above the substrate by a supporting element; an absorbing element that comprises several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; and a thermometric element that includes at least one thermometric material. The membrane includes the upper metal element of each MIM structure, and at least one portion of the thermometric material and the dielectric element. The upper metal elements of at least two MIM structures have different dimensions relatively to each other in a main plane of the membrane, and each dielectric element of the MIM structure includes at least one of following materials having vibration modes in the LWIR range:AlO, AlN, and TiO.SELECTED DRAWING: Figure 5 【課題】大きな吸収有効表面積を有する放射検出器を提案する。【解決手段】ＬＷＩＲ範囲の波長の放射検出器であって、基板、支持要素によって前記基板上に吊るされた膜と、各々が下部金属要素、各ＭＩＭ構造体に特有の上部金属要素、並びに、前記下部及び上部金属要素の間に位置する誘電体要素で形成された幾つかのＭＩＭ構造体を含む吸収要素と、少なくとも１つの温度測定材料を含む温度測定要素と、を含み、前記膜が、各ＭＩＭ構造体の前記上部金属要素、前記温度測定材料及び前記誘電体要素の少なくとも一部を含み、少なくとも２つの前記ＭＩＭ構造体の上部金属要素が、前記膜の主要面において互いに相対的に異なる寸法を有し、前記ＭＩＭ構造体の各々の誘電体要素が、前記ＬＷＩＲ範囲の振動モードを有する以下の材料：Ａｌ２Ｏ３、ＡｌＮ、ＴｉＯ２の少なくとも１つを含む、放射検出器。【選択図】図５