LAMINATED POLISHING PAD AND MANUFACTURING METHOD OF THE SAME

• Main Author: KAZUNO ATSUSHI
• Format: Patent
• Language: English; Japanese
• Published: 28.04.2016
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a laminated polishing pad which permits high-accuracy optical ending point detection and hardly peels off a window from a double-sided tape irrespective of such a structure that a back surface of a light transmission region is adhered to the double-sided tape, and to provide a manufacturing method of the laminated polishing pad.SOLUTION: A manufacturing method of a laminated polishing pad includes: a process of preparing an adhesion lamination sheet 17 by causing an unadhered lamination sheet in which a polishing layer 11 having a light transmission region 10 within an opening part A9 of a polishing region 8 and a double-sided tape 16 having a hot-melt adhesive layer 13 on one surface of a base material 12 and having a pressure-sensitive adhesive layer 14 and a releasing sheet 15 on the other surface are laminated on each other to pass through a pair of rollers of which the roller on the side of the double-sided tape is a hot roller, and adhering and fixing the polishing region and the light transmission region onto a hot-melt adhesive layer of the double-sided tape; and a process of peeling the release sheet from the adhesion lamination sheet and attaching a support layer 18 having the opening part B19 on a part corresponding to the light transmission region, onto the exposed pressure-sensitive adhesive layer. Therein, the release sheet has a surface in contact with the pressure-sensitive adhesive layer, of which the arithmetic average roughness Ra is 1 μm or less.SELECTED DRAWING: Figure 2 【課題】光透過領域の裏面が両面テープに接着した構造を有しているにもかかわらず、高精度の光学的終点検知が可能であり、かつ窓が両面テープから剥離し難い積層研磨パッド及びその製造方法を提供する。【解決手段】研磨領域８の開口部Ａ９内に光透過領域１０を有する研磨層１１と、基材１２の片面にホットメルト接着剤層１３を有し、他面に感圧接着剤層１４及び離型シート１５を有する両面テープ１６とを積層した未接着積層シートを、両面テープ側のロールが熱ロールである一対のロール間に通して研磨領域と光透過領域を両面テープのホットメルト接着剤層に接着固定して接着積層シート１７を作製する工程、及び接着積層シートから離型シートを剥離し、露出した感圧接着剤層に、光透過領域に対応する部分に開口部Ｂ１９を有する支持層１８を貼り付ける工程を含み、離型シートは、感圧接着剤層と接する面の算術平均粗さＲａが１μｍ以下である。【選択図】図２