MANUFACTURING METHOD OF ION FILTER

• Main Authors: ARAI DAISUKE, MATSUMURA KAZUTOSHI
• Format: Patent
• Language: English; Japanese
• Published: 25.04.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a manufacturing method of an ion filter 10 used in an electronic amplifier 100.SOLUTION: There is provided a manufacturing method of an ion filter including the steps of: preparing a base material including an insulating base material, a conductive layer 12A formed of a first material on one main surface of the insulating base material 11, and a conductive layer 13A formed of a second material different from the first material on the other main surface of the insulating base material 11; removing a predetermined area of the conductive layer 12A formed on the one main surface to form a first conductive layer 12 of a predetermined pattern; applying laser beams from a side of the one main surface or using an etchant to remove an area corresponding to the predetermined area of the insulating base material 11; and allowing an etchant to act from both surface sides of a base material 10A the predetermined area of which has been removed and thereby removing an area corresponding to the predetermined area of a conductive layer 13A formed on the other main surface.SELECTED DRAWING: Figure 3 【課題】電子増幅器１００に用いられるイオンフィルター１０の製造方法を提供する。【解決手段】絶縁性基材と、絶縁性基材１１の一方主面に第１の材料で形成された導電層１２Ａと、絶縁性基材１１の他方主面に、第１の材料とは異なる第２の材料で形成された導電層１３Ａと、を備えた基材を準備する工程と、一方主面に形成された導電層１２Ａの所定領域を除去して所定パターンの第１導電層１２を形成する工程と、一方主面側からレーザーを照射して又はエッチング液を用いて、絶縁性基材１１の所定領域に対応する領域を除去する工程と、所定領域が除去された基材１０Ａの両面側からエッチング液を作用させて、他方主面に形成された導電層１３Ａのうち所定領域に対応する領域を除去する工程と、を有するイオンフィルターの製造方法を提供する。【選択図】 図３