PIEZOELECTRIC VIBRATOR, AND METHOD OF MANUFACTURING THE SAME

• Main Author: YAN HANDONG
• Format: Patent
• Language: English; Japanese
• Published: 21.04.2016
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

PROBLEM TO BE SOLVED: To improve bonding reliability and manufacturing easiness of a piezoelectric vibrator having a structure in which a piezoelectric chip 20 having a frame part 24, a base 40, and a lid 60 are bonded each other.SOLUTION: A piezoelectric vibrator 10 includes a piezoelectric chip having a vibration part 22, a frame part 24, a coupling part 26, a through part 28, an excitation electrode 30, and an extraction electrode 32, a base 40 bonded to one surface of the piezoelectric chip, and a lid 60 bonded to the other surface of the piezoelectric chip. The base 40 of the piezoelectric vibrator 10 includes a connection pad 42 provided on a first surface on the piezoelectric chip side, an external mounting terminal 44 provided on a second surface opposite to the first surface, and a veer wiring 46 passing through the base for connecting the connection pad and the external mounting terminal. The connection pad 42 is connected to the extraction electrode 32 by a conductive adhesive 70.SELECTED DRAWING: Figure 1 【課題】枠部２４を有する圧電チップ２０とベース４０とリッド６０とを接合した構造の圧電振動子の接合信頼性及び製造容易性を改善する。【解決手段】圧電振動子１０は、振動部２２、枠部２４、連結部２６、貫通部２８、励振電極３０、及び引出電極３２を有する圧電チップと、圧電チップの一方の面に接合しているベース４０と、圧電チップの他方の面に接合しているリッド６０とを具える。そして、圧電振動子１０のベース４０は、圧電チップ側である第１の面に設けた接続パッド４２と、第１の面とは反対面である第２の面に設けた外部実装用端子４４と、これら接続パッドおよび外部実装用端子を接続するため当該ベースを貫通するビア配線４６とを具える。そして、これら接続パッド４２と引出電極３２とを導電性接着剤７０で接続してある。【選択図】図１