PLATINUM-SILICONE COMPOSITE TIP APEX APPLIED IN FIELD DETECTION, AND PREPARATION METHOD THEREOF

• Main Authors: SHIAO MING-HUA, DONG SHU-HONG, CHANG MAO-NAN, LIN JUN-TING
• Format: Patent
• Language: English; Japanese
• Published: 04.04.2016
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

PROBLEM TO BE SOLVED: To provide a platinum-silicon composite tip apex applied in field detection, and a preparation method thereof.SOLUTION: A platinum-silicon composite tip apex is prepared by: performing a local electrochemical reaction between a metal precursor solution and a modified silicon tip apex, by using an electroless plating deposition method (or, an electron beam induced deposition method) to obtain a local and selective platinum nanostructure deposition effect which is also accurately controlled; and further, through an atmospheric microwave annealing process, forming a local platinum silicide layer between the platinum nanostructure and the modified silicon probe tip apex.EFFECT: Conductivity of the tip apex and a field detection space analysis capability are significantly improved, therefore, the invention can be utilized as a probe in a high field sensitive scanning probe microscopic technology (FS-SPM). Also, not only preventing a stray field effect (SFE), but also an excellent image quality can be obtained. The probe tip containing platinum silicide effectively improves electron transmission effect in an interface compared to a probe tip having a platinum nanostructure only, thereby capable of being applied for a conductive probe which is controllable and has high space analysis capability.SELECTED DRAWING: Figure 3 【課題】フィールド検知に応用される白金-シリコン複合針先とその作成方法を提供する。【解決手段】無電気鍍金型板蒸着法（或いは、電子ビーム誘起蒸着法）で、金属前駆体溶液とシリコンプローブの針先の局部電化学反応を行わせ、局部的且つ選択的及び精確制御的な白金ナノ構造蒸着効果が得られ、更に、大気マイクロ波アニーリング工程に合わせて、白金ナノ構造とシリコンプローブの針先との間に、局部白金ケイ化物層が形成される。【効果】大幅に、針先の導電性とフィールド検知空間解析能力が向上され、高いフィールド感度走査顕微技術（FS-SPM）のプローブとして利用でき、漂遊磁界現象（SFE）を防止するだけでなく、より良い画像品質が得られ、白金ケイ化物を含有するプローブの先端は、白金ナノ構造だけを有するプローブの先端よりも、有効に、インターフェースの電子伝送効果が向上され、制御可能且つ高空間解析度の導電プローブに適用できる。【選択図】図３