LIGHTING DEVICE, OPTICAL INSPECTION DEVICE, AND OPTICAL MICROSCOPE

• Main Authors: KIMURA NOBUYUKI, TOGASHI MITSUHIRO, NUMATA MITSUNORI, TAKADA MASAKI
• Format: Patent
• Language: English; Japanese
• Published: 31.03.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a lighting device capable of changing the beam angle distribution of illumination light while restraining loss in the quantity of light.SOLUTION: A lighting device comprises: a light source that emits light; a multiple reflection element 4 that passes light Lc through a light incident surface 4a, reflects the light therein multiples times, and then emits light from a light emission surface; and an optical element 3 that is placed on a light path between the light source and the multiple reflection element 4, and changes the beam angle distribution of light Lb. The optical element 3 at least includes a pair of two conical lenses 21 and 22, and during the passage of the light Lb through between the two conical lenses 21 and 22, the light path of a beam is switched at positions between the inner peripheral side and outer peripheral side of the pupil surface of the light Lb.SELECTED DRAWING: Figure 2 【課題】光量の損失を抑えつつ、照明光の光線角度分布を変化させることができる照明装置を提供する。【解決手段】光を出射する光源と、光Ｌｃを光入射面４ａから入射し、内部で多重反射させた後、光出射面から出射する多重反射素子４と、光源と多重反射素子４との間の光路中に配置され、光Ｌｂの光線角度分布を変化させる光学素子３と、を備え、光学素子３は、少なくとも対となる２つの円錐レンズ２１，２２を含み、２つの円錐レンズ２１，２２の間を光Ｌｂが通過する間に、光Ｌｂの瞳面の内周側と外周側とで光線の光路が入れ替わる。【選択図】図２