SENSOR DEVICE INCLUDING A PLURALITY OF SENSORS FOR EXPOSURE DEVICE

• Main Authors: RUDOLPH BERND, MACH PETER
• Format: Patent
• Language: English; Japanese
• Published: 22.03.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a sensor device for a device for exposure or light resistance test of a sample.SOLUTION: A sensor device 100 comprises a sensor housing 110 made of stainless steel having a basis shape of substantially right parallelepipedon. In front of a first outer wall 112 of the sensor housing 110, a plate 111 is fixed to the first outer wall 112 with space therefrom with a plurality of screws 113 provided in areas at four corners of the plate 111. The screws pass through spacer sleeves 114 between the plate 111 and the first outer wall 112, respectively and are screwed in respective bores corresponding to areas at four corners of the first outer wall 112. A black standard sensor 120 is fixed to the plate 111 so as to face an irradiation source of an exposure device during operation of the exposure device.SELECTED DRAWING: Figure 2 【課題】試料の暴露又は耐光性試験用の装置のためのセンサ装置を提供する。【解決手段】センサ装置１００は、略正平行六面体の基本形状を有する、ステンレス鋼からなるセンサハウジング１１０を含む。センサハウジング１１０の第一外壁１１２の前方には、プレート１１１が第一外壁１１２から間隔を空けて該外壁に固定される。該固定は、プレート１１１の四隅の領域に配置された複数のねじ１１３によって施され、各ねじは、プレート１１１と第一外壁１１２との間のスペーサスリーブ１１４を通過し、第一外壁１１２の四隅の領域の対応する各ボア内に螺合される。ブラック標準センサ１２０はプレート１１１に固定され、暴露装置の動作中には暴露装置の照射源と対向する。【選択図】図２