EXPOSURE DEVICE AND CLEANING METHOD

• Main Author: WATANABE GENTA
• Format: Patent
• Language: English; Japanese
• Published: 07.03.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide: an exposure device having a function that can remove carbon based contaminated substances with a high efficiency and at a high speed, the carbon based contaminated substances being deposited on an optical system element of a reflection type exposure device with the...