ENVIRONMENTAL SYSTEM INCLUDING TRANSPORT REGION FOR IMMERSION LITHOGRAPHY APPARATUS

PROBLEM TO BE SOLVED: To provide an environmental system for controlling an environment of a gap between an optical assembly and a device, which comprises a fluid barrier, an immersion fluid system and a transport region, wherein the transport region captures an immersion fluid flowing from the gap...

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Bibliographic Details
Main Authors WATSON DOUGLAS C, NOVAK THOMAS W, HAZELTON ANDREW J
Format Patent
LanguageEnglish
Japanese
Published 12.02.2016
Subjects
ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To provide an environmental system for controlling an environment of a gap between an optical assembly and a device, which comprises a fluid barrier, an immersion fluid system and a transport region, wherein the transport region captures an immersion fluid flowing from the gap and prevents the leakage of the fluid, and direct decompression suction which may cause the deformation of the device and/or the optical assembly is prevented from being used for the device.SOLUTION: The fluid barrier 254 is positioned near the device and maintains the transport region near the gap. The immersion fluid system 252 delivers the immersion fluid 248 that fills the gap 246. The transport region transports at least a portion of the immersion fluid 248 that is near the fluid barrier 254 and the device away from the device. The immersion fluid system 252 can include a fluid removal system 282 that is in fluid communication with the transport region 256. The transport region 256 can be formed of a porous material.SELECTED DRAWING: Figure 2B 【課題】光アセンブリとデバイスの間のギャップの環境を制御する環境システムは、流体バリア、液浸流体システム、及び移送領域を含む。移送領域は、ギャップから出る液浸流体を捕え流体の漏出を防ぐとともに、デバイス及び／又は光学アセンブリを変形させる可能性のある直接的な減圧吸引をデバイスに使用することを回避する環境システムを提供する。【解決手段】流体バリア２５４は、デバイスの近くに位置付けられ、移送領域をギャップの近くに維持する。液浸流体システム２５２は、ギャップ２４６を充たす液浸流体２４８を供給する。移送領域は、流体バリア２５４、及びデバイスの近くにある液浸流体２４８の少なくとも一部をデバイスから離れるように移送する。液浸流体システム２５２は、移送領域２５６と流通している流体除去システム２８２を含むことができる。移送領域２５６は多孔性材料で製作できる。【選択図】図２Ｂ
Bibliography:Application Number: JP20150219233