CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING DEVICE, CHEMICAL LIQUID DISCHARGE METHOD AND STORAGE MEDIUM

• Main Authors: HAMADA MASAHITO, INADA HIROICHI, SASAGAWA NORIHIKO
• Format: Patent
• Language: English; Japanese
• Published: 04.02.2016
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a technology capable of reducing a height occupied by a discharge path for a chemical liquid, in a chemical liquid discharge mechanism for discharging the chemical liquid with relatively high viscosity.SOLUTION: The liquid discharge mechanism includes: a storage part including a storage space in which the chemical liquid is stored; a dilution supply port which is opened for supplying a dilution that reduces the viscosity of the chemical liquid, into the storage space; an eddy forming part for forming eddies in the dilution and the chemical liquid by supplying a fluid into the storage space in order to stir the dilution and the chemical liquid; and a liquid discharge port which is opened at an upper side of the dilution supply port in the storage space in order to make the stirred dilution and chemical liquid flow in by supplying the dilution and discharge the chemical liquid from the storage space. Thus, the viscosity of a waste liquid discharged from the liquid discharge port can be reduced and it is not necessary to enable an inclination of the liquid discharge path connected to the liquid discharge port relative to a horizontal plane.SELECTED DRAWING: Figure 7 【課題】粘度が比較的高い薬液を排出するための薬液排出機構において、当該薬液の排液路が占める高さを小さくすることができる技術を提供すること。【解決手段】薬液が貯留される貯留空間を備えた貯留部と、前記貯留空間に、前記薬液の粘度を下げる希釈液を供給するために開口する希釈液供給口と、前記希釈液と前記薬液とを撹拌させるために前記貯留空間に流体を供給して、当該希釈液及び薬液に渦流を形成するための渦流形成部と、撹拌済みの前記希釈液及び薬液を、前記希釈液の供給により流入させて前記貯留空間から排出するために、当該貯留空間において前記希釈液供給口の上方に開口する排液口と、を備えるように排液機構を構成する。このような構成により、排液口から排出される廃液の粘度を低下させることができ、当該排液口に接続される排液路の水平面に対する傾きを大きくする必要がなくなる。【選択図】図７