LAMINATION TYPE ULTRAHIGH VACUUM CREATION DEVICE

• Main Author: TANAKA HIDEYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 21.01.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide an ultrahigh vacuum creation device containing an ion pump whose size in the center axis direction is reduced.SOLUTION: An ultrahigh vacuum creation device 1 has at least one ion pump 100. The ion pump 100 has a casing 110 having at least one opening 111, 112, a disc-shaped electrode group 120 which is disposed in the casing 110, has a center opening 120a formed along a predetermined center axis C, and is formed by linking plural electrodes 121 so that the electrodes 121 are spaced from one another, a pair of disc-shaped electrodes 131, 132 which are disposed at positions where the electrode group 120 is sandwiched from both the sides in the casing 110, and has a different polarity from the electrode group 120, and a pair of disc-shaped magnets 141, 142 disposed at positions where the pair of disc-shaped electrodes 131, 132 are sandwiched from both the sides. 【課題】中心軸方向のサイズを小型化したイオンポンプを含む超高真空作成装置を提供する。【解決手段】超高真空作成装置１は，少なくとも一つのイオンポンプ１００を備える。イオンポンプ１００は，少なくとも一つの開口１１１，１１２を有するケーシング１１０と，ケーシング１１０の内部に配置され所定の中心軸Ｃに沿って中心開口１２０ａが形成されているとともに複数の電極１２１が間隔を空けて連結することにより形成された盤状の電極群１２０と，ケーシング１１０の内部のうち電極群１２０を両側から挟む位置に配置され電極群１２０とは極性が異なる一対の盤状電極１３１，１３２と，一対の盤状電極１３１，１３２を両側から挟む位置に配置された一対の盤状磁石１４１，１４２と，を備える。【選択図】図１