ALKALI DEVELOPMENT TYPE PHOTOSENSITIVE DIELECTRIC COMPOSITION

• Main Author: NAKAYAMA YUTAKA
• Format: Patent
• Language: English; Japanese
• Published: 07.01.2016
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP

PROBLEM TO BE SOLVED: To provide an alkali development type photosensitive dielectric composition that enables formation of a via hole by a photolithography method and achieves plasticity or flexibility much the same as that of a dielectric green sheet even after photocured.SOLUTION: In the alkali development type photosensitive dielectric composition, a mass ratio of (A-I) a polyvinyl butyral resin to (A-II) a (meth)acrylic resin having a carboxyl group each of which (A) a binder resin contains is adjusted within the range of 5:95 to 60:40; a mass ratio of (A) the binder resin to (B) a photoreactive monomer is adjusted within the range of 20:80 to 70:30; and a mass ratio of (D) a dielectric powder to the total of (A) the binder resin and (B) the photoreactive monomer is adjusted within the range of 30:70 to 90:10. 【課題】 アルカリ現像型感光性誘電体組成物において、フォトリソグラフィー法によりビアホール形成が可能であるとともに、光硬化した後であっても、誘電体グリーンシートと同程度の柔軟性または可撓性を実現する。【解決手段】 本発明に係るアルカリ現像型感光性誘電体組成物においては、（Ａ）バインダー樹脂が含有する（Ａ−Ｉ）ポリビニルブチラール樹脂と（Ａ−ＩＩ）カルボキシル基を有する（メタ）アクリル樹脂との質量比が、５：９５〜６０：４０の範囲内となっており、（Ａ）バインダー樹脂と（Ｂ）光反応性モノマーとの質量比が２０：８０〜７０：３０の範囲内となっており、さらに、（Ｄ）誘電体粉末と、（Ａ）バインダー樹脂および（Ｂ）光反応性モノマーの合計との質量比が、３０：７０〜９０：１０の範囲内となっている。【選択図】 なし