VIBRATION TYPE ANGULAR VELOCITY SENSOR

• Main Authors: SHIROMORI TOMOYA, GOTO KATSUAKI
• Format: Patent
• Language: English; Japanese
• Published: 07.01.2016
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

PROBLEM TO BE SOLVED: To separate the axis of vibrations generated in a vibration type angular velocity sensor and detect an unnecessary vibration accurately.SOLUTION: A detection-use thin film 63b provided in a z-axis vibration detection unit 63 is also deformable by a vibration in the x-axis or y-...