VIBRATION TYPE ANGULAR VELOCITY SENSOR

• Main Authors: SHIROMORI TOMOYA, GOTO KATSUAKI
• Format: Patent
• Language: English; Japanese
• Published: 07.01.2016
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

PROBLEM TO BE SOLVED: To separate the axis of vibrations generated in a vibration type angular velocity sensor and detect an unnecessary vibration accurately.SOLUTION: A detection-use thin film 63b provided in a z-axis vibration detection unit 63 is also deformable by a vibration in the x-axis or y-axis direction of driving-cum-detection weights 31, 32. For this reason, the vibration in the x-axis direction of the driving-cum-detection weights 31, 32 is detected by an x-axis vibration detection unit having a movable comb-shaped electrode 61 and a fixed comb-shaped electrode 65, and a vibration in the y-axis direction is detected by a y-axis vibration detection unit having a movable comb-shaped electrode 62 and a fixed comb-shaped electrode 67. Then a vibration component in the z-axis direction generated on the basis of vibrations in the x-axis and y-axis directions is removed from the vibration in the z-axis direction. An unnecessary vibration component included in the vibration in the z-axis direction is thereby extracted. 【課題】振動型角速度センサに発生する振動の軸を分離して、不要振動を的確に検出できるようにする。【解決手段】ｚ軸振動検出部６３に備えられた検出用薄膜６３ｂは、駆動兼検出用錘３１、３２のｘ軸もしくはｙ軸方向の振動によっても変形し得る。このため、駆動兼検出用錘３１、３２のｘ軸方向の振動を可動櫛歯電極６１および固定櫛歯電極６５を有するｘ軸振動検出部にて検出すると共に、ｙ軸方向の振動を可動櫛歯電極６２および固定櫛歯電極６７を有するｙ軸振動検出部にて検出する。そして、ｚ軸方向の振動からｘ軸方向およびｙ軸方向の振動に基づいて発生しているｚ軸方向の振動成分を除去する。これにより、ｚ軸方向の振動に含まれる不要振動成分を抽出する。【選択図】図５