CHARGED PARTICLE BEAM DEVICE, RECONSTRUCTED IMAGE PROCESSING SYSTEM AND METHOD OF THREE-DIMENSIONAL IMAGE

• Main Authors: BABA MISUZU, TOMONAGA SACHIHIKO, HASHIMOTO TAKAHITO, BABA NORIO, YOTSUTSUJI TAKAFUMI
• Format: Patent
• Language: English; Japanese
• Published: 24.12.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To solve such a problem that high speed high accuracy alignment of transmission image is impossible for the wide sample, inclination angle conditions, in the reconstruction of three-dimensional image of a transmission image.SOLUTION: In an imaging sequence for inclining a sample at a predetermined angle step, and acquiring first through N-th images for every inclination angle, the sample is aligned based on the results of three-dimensional phase correlation of a first reverse projection line image volume, and a second reverse projection image volume, corresponding to a temporary second image when the sample is inclined by 1 step, and then a second reverse projection line image volume corresponding to the second image of the sample after the alignment is determined as the reconstruction data. 【課題】透過像の三次元画像の再構成において、幅広い試料、傾斜角度条件に対して、高速かつ高精度に透過像の位置合わせを実行することができなかった。【解決手段】試料を所定の角度ステップで傾斜し、傾斜角度毎に第１から第Ｎの画像を取得する撮像シーケンスにおいて、前記第１の画像に対応する第１の逆投影線像ボリュームと、前記試料を１ステップ分傾斜させたときの仮の第２の画像に対応する第２の逆投影像ボリュームと、の三次元相互相関の結果に基づいて、前記試料の位置合わせを行い、当該位置合わせ後の試料の第２の画像に対応する第２の逆投影線像ボリュームを求め、再構成用データとする。【選択図】図１