EVALUATION METHOD, GROWTH METHOD, EVALUATION DEVICE, AND GROWTH DEVICE

PROBLEM TO BE SOLVED: To highly accurately evaluate the density and shape of a CNT (Carbon NanoTube).SOLUTION: An evaluation method includes the steps of: applying an X ray 50 having irradiation intensity to a carbon nanotube 12 growing on a substrate 10; detecting transmission intensity of an X ray...

Full description

Saved in:
Bibliographic Details
Main Authors HIROSE SHINICHI, DOI SHUICHI
Format Patent
LanguageEnglish
Japanese
Published 21.12.2015
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To highly accurately evaluate the density and shape of a CNT (Carbon NanoTube).SOLUTION: An evaluation method includes the steps of: applying an X ray 50 having irradiation intensity to a carbon nanotube 12 growing on a substrate 10; detecting transmission intensity of an X ray 52 transmitting through the carbon nanotube 12; detecting diffraction intensity of an X ray 54 diffracted by the carbon nanotube 12; and calculating the density and shape of the carbon nanotube 12 on the basis of the irradiation intensity, transmission intensity, and diffraction intensity. 【課題】ＣＮＴの密度および形状を精度よく評価すること。【解決手段】基板１０上に成長するカーボンナノチューブ１２に照射強度を有するＸ線５０を照射するステップと、前記カーボンナノチューブ１２を透過したＸ線５２の透過強度を検出するステップと、前記カーボンナノチューブ１２により回折されたＸ線５４の回折強度を検出するステップと、前記照射強度、前記透過強度および前記回折強度に基づき、前記カーボンナノチューブ１２の密度および形状を算出するステップと、を含む評価方法。【選択図】図１
Bibliography:Application Number: JP20140115804