FOREIGN MATTER REMOVAL METHOD FOR TEMPLATE, PRODUCTION METHOD OF TEMPLATE AND BASE PLATE FOR FOREIGN MATTER REMOVAL

• Main Author: HIRAKA TAKAAKI
• Format: Patent
• Language: English; Japanese
• Published: 14.12.2015
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

PROBLEM TO BE SOLVED: To provide a foreign matter removal method for a template which enables removal of foreign matter in a concave part of an uneven structure of a template while suppressing breakage of the template, a production method of the template and a base plate for foreign matter removal.SOLUTION: A foreign matter removal method for a template uses a base plate for foreign matter removal having a base part and a convex part protruding from the base part and comprises arranging a curable material on the upper surface of the convex part, bringing the curable material arranged on the upper surface of the convex part in contact with an irregular structure of a template opposing the curable material and adhered with foreign matter, hardening the curable material and separating the curable material from the template. 【課題】 本発明は、テンプレートの破損を抑制しつつ、テンプレートの凹凸構造の凹部内の異物を除去することが可能な、テンプレートの異物除去方法、テンプレートの製造方法、および異物除去用基板を提供することを目的とするものである。【解決手段】 基部と該基部から突出する凸部を有する異物除去用基板を用い、前記凸部の上面に硬化性材料を配設し、前記凸部の上面に配設した硬化性材料を対向するテンプレートの異物が付着している凹凸構造に接触させ、前記硬化性材料を硬化させた後にテンプレートと前記硬化性材料とを離間することにより、上記課題を解決する。【選択図】 図２