BREAK METHOD AND BREAK DEVICE

PROBLEM TO BE SOLVED: To provide a break method and a break device which can easily break along a scribe line by a low load with a simple mechanism without using a break bar.SOLUTION: By disposing a first projection formation unit 4, which comprises a projection 4a perpendicular to a substrate feed...

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Bibliographic Details
Main Author OKAJIMA YASUTOMO
Format Patent
LanguageEnglish
Japanese
Published 10.12.2015
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Summary:PROBLEM TO BE SOLVED: To provide a break method and a break device which can easily break along a scribe line by a low load with a simple mechanism without using a break bar.SOLUTION: By disposing a first projection formation unit 4, which comprises a projection 4a perpendicular to a substrate feed direction, on an intermediate undersurface of a belt 2 of a conveyor 3 for conveying a substrate M, and pushing up the belt 2, a portion of the belt 2 is projected, and a projection strip part 2a perpendicular to the substrate feed direction is formed. The substrate M is placed on the belt 2 in a state in which a scribe line S1 to be broken is perpendicular to the substrate feed direction. The substrate M is conveyed from an upstream side flat part 2b of the projection strip part 2a to a downstream side flat part 2c. By infiltrating a crack of the scribe line S1 formed on a bent outer surface side in a thickness direction by the bending of the substrate M when the substrate M is shifted to the downstream side flat part 2c beyond the projection strip part 2a, the substrate M is broken along the scribe line S1. 【課題】ブレイクバーを用いず、簡単な機構で低荷重により容易にスクライブラインに沿ってブレイクすることができるブレイク方法並びにブレイク装置を提供する。【解決手段】基板Mを搬送するコンベア3のベルト2の中間下面に、基板送り方向に直交する凸部4aを備えた第一凸部形成ユニット4を配置してベルト2を押し上げることにより、ベルト2の一部を隆起させて基板送り方向に直交する凸条部2aを形成し、このベルト2に、分断すべきスクライブラインS1を基板送り方向に直交させた状態で基板Mを載置して、当該基板Mを凸条部2aの上流側平坦部2bから下流側平坦部2cに搬送し、基板Mが凸条部2aを乗り越えて下流側平坦部2cに移行する際の基板Mの屈曲によって、屈曲外面側に形成されているスクライブラインS1の亀裂を厚み方向に浸透させることにより、当該スクライブラインS1に沿って基板Mをブレイクする。【選択図】図2
Bibliography:Application Number: JP20140105804