FORCE SENSOR AND GRASPING DEVICE

• Main Author: SOEDA YASUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 07.12.2015
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To solve the problem with a force sensor for detecting a contact load, etc., that when the area of a detection element of a unit becomes large, the area of a membrane becomes large and the deformation of the membrane due to a load becomes large.SOLUTION: A force sensor 101 of capacitance type according to the present invention has a plurality of cells each configured with a lower electrode 104, a movable part including an upper electrode 107 and having flexibility, and a support part 105b for movably supporting the movable part and forming a gap 106 between the upper and lower electrodes. A protrusion 123 is provided above the movable part of the cell, and the plurality of cells are grouped into elements including one or more cells, the cells in the same element being electrically connected to each other. 【課題】接触荷重などを検出する力覚センサにおいて、単位の検出素子の面積が大きくなると、メンブレンの面積が大きくなり荷重によるメンブレンの変形が大きくなるという課題があった。【解決手段】本発明の静電容量型の力覚センサ１０１は、下電極１０４と、上電極１０７を含み可撓性を有する可動部と、可動部を可動に支持し上下電極間にギャップ１０６を形成する支持部１０５ｂで構成されたセルが複数ある。セルの可動部の上に突起１２３が設けられ、複数のセルは、１以上のセルを含むエレメントにグループ分けされ、同一のエレメントではセルは互いに電気的に接続されている。【選択図】図１