FABRY-PEROT INTERFEROMETER

• Main Authors: IWAKI TAKAO, GOTO KATSUAKI, ENOMOTO TETSUYA, SUZUKI YOSHIMI
• Format: Patent
• Language: English; Japanese
• Published: 19.11.2015
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; RADIATION PYROMETRY; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a Fabry-Perot interferometer that has a wide modulation band of a transmission spectrum.SOLUTION: A Fabry-Perot interferometer 10 comprises: a stationary mirror structure 12 that has a stationary mirror M1 in a transmission area S1; a movable mirror structure 14 that has a membrane MEM facing the stationary mirror structure via an air gap AG, and has a movable mirror M2 provided in the membrane to face the stationary mirror; and a piezoelectric drive unit 16 that has a piezoelectric film 40 and electrodes 42 and 44 formed on both surfaces of the piezoelectric film in an opposite direction, and is arranged on the movable mirror structure in a peripheral area T1 for displacing the membrane. The movable mirror structure has: a pair of high refractive index layers 34 and 36; a low refractive index layer 38 that forms the movable mirror interposed between the high refractive index layers in the transmission area along with the high refractive index layers; and an addition layer 46 that is added to the pair of high refractive layers for thickening a thickness of a part where the piezoelectric drive unit is arranged in the peripheral area. 【課題】透過スペクトルの変調帯域が広いファブリペロー干渉計を提供する。【解決手段】ファブリペロー干渉計１０は、透過領域Ｓ１に固定ミラーＭ１を有する固定ミラー構造体１２、エアギャップＡＧを介して固定ミラー構造体と対向するメンブレンＭＥＭを有し、該メンブレンに、固定ミラーに対向して設けられた可動ミラーＭ２を有する可動ミラー構造体１４、圧電膜４０と、対向の方向において圧電膜の両面に形成された電極４２，４４と、を有し、メンブレンを変位させるために、周辺領域Ｔ１において、可動ミラー構造体上に配置された圧電駆動部１６、を備える。可動ミラー構造体は、一対の高屈折率層３４，３６、透過領域において高屈折率層間に介在され、一対の高屈折率層とともに可動ミラーを形成する低屈折率層３８、周辺領域における圧電駆動部が配置される部分の厚みを厚くするために、一対の高屈折率層に追加された追加層４６、を有する。【選択図】図４