LASER ULTRASONIC MEASURING APPARATUS

• Main Authors: TACHIKA HIDEYUKI, YOKOYAMA JUN, FURUTA HIROKAZU
• Format: Patent
• Language: English; Japanese
• Published: 19.11.2015
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a laser ultrasonic measuring apparatus capable of measuring inside of an object with high resolution.SOLUTION: The laser ultrasonic measuring apparatus includes: a laser oscillator that emits a laser beam; a branching optical system that branches the laser beam from the laser oscillator; a delay optical system that gives an optical lengths different from each other to each of the branched laser beams; a liquid crystal DOE that allows the laser beams emitted from the delay optical system to pass therethrough; a condenser lens that irradiates the surface of an object with the laser beams passing through the liquid crystal DOE; un ultrasonic wave sensor that detects the ultrasonic waves from the object; and a control section that scans the focusing positions of the ultrasonic waves inside the object while changing the pattern of the liquid crystal DOE. 【課題】高い分解能で被検体の内部を測定できるレーザ超音波測定装置を提供する。【解決手段】レーザを発するレーザ発振器と、前記レーザ発振器からのレーザを分岐する分岐光学系と、分岐された各レーザに対して異なる光路長を付与するディレイ光学系と、前記ディレイ光学系を出射した各レーザを通過させる液晶ＤＯＥと、前記液晶ＤＯＥを通過した各レーザを被検体の表面に照射する集光レンズと、前記被検体からの超音波を検出する超音波センサと、前記液晶ＤＯＥのパターンを変化させて、前記被検体内部における超音波の集束位置を走査する制御部と、を備えるレーザ超音波測定装置。【選択図】図１