PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, LIQUID INJECTION DEVICE AND SENSOR

• Main Authors: MOROZUMI KOICHI, FURUBAYASHI TOMOKAZU
• Format: Patent
• Language: English; Japanese
• Published: 05.11.2015
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide: a piezoelectric element that is able to preferentially orient a piezoelectric layer on a (100) face by using a seed layer that is able to reduce the effect of a voltage drop on an applied voltage and also able to improve an amount of displacement; and to provide a liquid injection head having a piezoelectric element, a liquid injection device, and a sensor.SOLUTION: A piezoelectric element 300 comprises: a first electrode 60; a piezoelectric layer 70 provided on the first electrode 60 via a seed layer 65; and a second electrode 80 provided on the piezoelectric layer 70. In the piezoelectric element 300, the seed layer 65 comprises a complex oxide having a perovskite structure and preferentially oriented on a (100) face whose A site contains bismuth and whose B site contains iron and titanium. The piezoelectric layer 70 is formed from a piezoelectric material having the perovskite structure and preferentially oriented on the (100) face, and the thickness of the seed layer 65 is less than 20 nm. 【課題】印加電圧に対する電圧降下の影響を低減できるシード層を用いて、圧電体層を（１００）面に優先配向させると共に変位量を向上することができる圧電素子、圧電素子を具備する液体噴射ヘッド、液体噴射装置及びセンサーを提供する。【解決手段】第１電極６０と、第１電極６０にシード層６５を介して設けられた圧電体層７０と、圧電体層７０に設けられた第２電極８０とを備えた圧電素子３００であって、シード層６５は、ペロブスカイト構造を有してＡサイトがビスマスを含み、Ｂサイトが鉄及びチタンを含む（１００）面に優先配向している複合酸化物からなり、圧電体層７０は、ペロブスカイト構造を有して（１００）面に優先配向している圧電材料からなり、シード層６５の厚さは、２０ｎｍ未満である。【選択図】図３