CORROSION RESISTANT MEMBER

• Main Authors: TAKIGUCHI YASUHIRO, MAEDA KEISUKE, MURATA MASATAKA
• Format: Patent
• Language: English; Japanese
• Published: 05.11.2015
• Subjects: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; GLASS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a corrosion resistant member excellent in low dust emission properties and corrosion resistance.SOLUTION: Provided is a corrosion resistant member in which the corrosion resistant face at least exposed to a corrosive gas and its plasma includes SiOas the main component, and comprising AlOand rare earth oxides and further comprising one or more kinds of oxides selected from the group 4 elements. 【課題】低発塵性及び耐食性に優れた耐食性部材を提供すること。【解決手段】少なくとも腐食性ガスやそのプラズマに曝露される耐食面がＳｉＯ２を主成分とし、Ａｌ２Ｏ３と、希土類酸化物とを含み、さらに第４の金属元素群から選ばれる１種以上の酸化物を含む耐食性部材であることを特徴とする。【選択図】 なし