LIGHT IRRADIATION APPARATUS AND DRAWING APPARATUS
PROBLEM TO BE SOLVED: To easily produce an optical path length difference generation section.SOLUTION: A light irradiation apparatus 31 includes a light source section 4 for emitting a laser beam and an irradiation optical system 5 for guiding the laser beam to an irradiation surface 320 along an op...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
02.11.2015
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Subjects | |
Online Access | Get full text |
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