LIGHT IRRADIATION APPARATUS AND DRAWING APPARATUS

• Main Authors: ITO RYOSUKE, KOKUBO MASAHIKO
• Format: Patent
• Language: English; Japanese
• Published: 02.11.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MACHINE TOOLS; MATERIALS THEREFOR; METAL-WORKING NOT OTHERWISE PROVIDED FOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

PROBLEM TO BE SOLVED: To easily produce an optical path length difference generation section.SOLUTION: A light irradiation apparatus 31 includes a light source section 4 for emitting a laser beam and an irradiation optical system 5 for guiding the laser beam to an irradiation surface 320 along an optical axis J1. The irradiation optical system 5 includes an optical path length difference generation section 61, a split lens section 62 and a condenser lens section 63. The optical path length difference generation section 61 includes a plurality of translucent parts having mutually different optical path lengths. The split lens section 62 includes a plurality of lenses for splitting incident light. The condenser lens section 63 overlaps irradiation regions 50 of beams from the plurality of lenses on the irradiation surface 320. An intermediate variable magnification section 64 is formed between the optical path length difference generation section 61 and the split lens section 62. Beams having passed through the plurality of translucent parts are made incident on the plurality of lenses respectively through the intermediate variable magnification section 64 constituting a reduction optical system. Consequently, the optical path length difference generation section 61 can be easily produced by forming the optical path length difference generation section 61 larger than the split lens section 62 in an array direction of the translucent parts. 【課題】光路長差生成部を容易に作製する。【解決手段】光照射装置３１は、レーザ光を出射する光源部４と、当該レーザ光を光軸Ｊ１に沿って照射面３２０へと導く照射光学系５とを備える。照射光学系５は、光路長差生成部６１と、分割レンズ部６２と、集光レンズ部６３とを備える。光路長差生成部６１は、互いに異なる光路長を有する複数の透光部を有する。分割レンズ部６２は、入射する光を分割する複数のレンズを有する。集光レンズ部６３は、照射面３２０上にて当該複数のレンズからの光の照射領域５０を重ねる。光路長差生成部６１と分割レンズ部６２との間には中間変倍部６４が設けられる。複数の透光部を通過した光は、縮小光学系を構成する中間変倍部６４を介して複数のレンズにそれぞれ入射する。これにより、透光部の配列方向に関して、光路長差生成部６１を分割レンズ部６２よりも大きくして、光路長差生成部６１を容易に作製することができる。【選択図】図２