PIEZOELECTRIC ACTUATOR, LIQUID SPRAY HEAD AND LIQUID SPRAY DEVICE

• Main Authors: WATANABE SHUNSUKE, YAZAKI SHIRO
• Format: Patent
• Language: English; Japanese
• Published: 02.11.2015
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of suppressing a piezoelectric layer from being destroyed, a liquid spray head and a liquid spray device.SOLUTION: The piezoelectric actuator is provided with first electrodes 60 formed above a substrate 10 having recessed portions 12 formed, piezoelectric layers 70 and second electrodes 80 provided at opposite sides of the first electrodes 60, in which a plurality of active portions 310 are arranged parallely in a first direction. The first electrodes 60 are individual electrodes individually provided in the active portions 310, and the second electrodes 80 are common electrodes provided commonly in the plurality of active portions 310. The second electrodes 80 are extended from one ends in a second direction crossing the first direction of the recessed portions 12 to the outsides of the recessed portions 12. In the second direction, between the first electrodes 60 and the piezoelectric layers 70, near sides to which at least the second electrodes 80 are extended, are provided insulation layers 130 that regulate end portions of the active portions 310. The first electrodes 60 are extended in the second direction from the active portions 310 through the substrate 10 side rather than the insulation layers 130 to the outsides of the recessed portions 12. 【課題】圧電体層の破壊を抑制することができる圧電アクチュエーター、液体噴射ヘッド及び液体噴射装置を提供する。【解決手段】凹部１２が形成された基板１０の上方に形成された第１電極６０と、圧電体層７０と、第１電極６０とは反対面側に設けられた第２電極８０と、を具備し、能動部３１０が第１の方向に複数並設され、第１電極６０は、能動部３１０に個別に設けられた個別電極であり、第２電極８０は、複数の能動部３１０に共通して設けられた共通電極であり、第２電極８０は、凹部１２の第１の方向に交差する第２の方向の一端部から凹部１２の外側まで延設され、第２の方向において、少なくとも第２電極８０の延設された側の第１電極６０と圧電体層７０との間には、能動部３１０の端部を規定する絶縁層１３０が設けられ、第１電極６０は、絶縁層１３０よりも基板１０側を介して能動部３１０から凹部１２の外側まで第２の方向に延設されている。【選択図】図５