MEMS ELEMENT

• Main Authors: FUKUTOME TAKAO, USUI TAKAHIDE, CHIBA MASAHIKO, FUJII HIROKAZU
• Format: Patent
• Language: English; Japanese
• Published: 02.11.2015
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a structure of MEMS elements capable of improving sensitivity of MEMS elements and preventing damage to a membrane.SOLUTION: An MEMS element which has a substrate 1 having a back chamber 17, with an air gap formed on the substrate by arranging a fixed electrode 13 and a movable electrode 6 across a spacer 18, includes: vent structures 7, 8 on part of the movable electrode which, when excessive pressure is applied to the movable electrode, pass the pressure to its rear side; and movable lid parts 3, 11 which cover the vent structures during normal operation. 【課題】ＭＥＭＳ素子の感度を向上させながら、膜の破損を防止するＭＥＭＳ素子の構造を提供する。【解決手段】バックチャンバー１７を備えた基板１と、この基板上に、スペーサー１８を挟んで固定電極１３と可動電極６とを配置することでエアーギャップが形成されたＭＥＭＳ素子であって、可動電極の一部に、可動電極に過大な圧力が印加されたとき、その圧力をその裏面側に通過させるベント構造７、８を備えるとともに、通常動作時にはそのベント構造を覆う可動蓋部３、１１を備えている。【選択図】図３