SUBSTRATE MATRIX TO DECOUPLE TOOL AND PROCESS EFFECTS

• Main Authors: DANIEL KANDEL, PAVEL IZIKSON, MICHAEL E ADEL
• Format: Patent
• Language: English; Japanese
• Published: 15.10.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To solve the problem of a method of measuring and analyzing test substrates sometimes suffering from an undesirable confounding of correlations between parameters and measured properties, which confounding tends to reduce accuracy in the correlations between the parameters and...