SAMPLE STAGE AND SCANNING PROBE MICROSCOPE

• Main Authors: NISHIDA SHUHEI, FUJII TERUO
• Format: Patent
• Language: English; Japanese
• Published: 28.09.2015
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

PROBLEM TO BE SOLVED: To allow easy and efficient observation of a sample included in a fluid without using a filter device separate from a scanning probe microscope by attaching a filter holding part holding a sample to a fluid cell of a sample stage.SOLUTION: A sample stage 10 for holding a sample being an observation object of a scanning probe microscope includes a fluid cell 11 to which a fluid including the sample is to be introduced, and a filter unit including a filter 15 which allows the fluid to pass therethrough and on which at least a part of the sample deposits. The fluid cell 11 includes a fluid introduction inlet, and the filter unit includes a fluid outlet and is attached to one face of the fluid cell 11. 【課題】フィルタを保持するフィルタ保持部を試料台の流体セルに取り付けることによって、走査型プローブ顕微鏡と別個の濾（ろ）過装置を使用することなく、流体に含有された試料を容易に、かつ、効率よく観察することができるようにする。【解決手段】走査型プローブ顕微鏡の観察対象となる試料を保持する試料台１０であって、前記試料を含有する流体が導入される流体セル１１と、前記流体の通過を許容するとともに前記試料の少なくとも一部が付着するフィルタ１５を含むフィルタユニットとを備え、前記流体セル１１は流体導入口を含み、前記フィルタユニットは、流体排出口を含み、前記流体セル１１の一面に取り付けられる。【選択図】図１