LIQUID JET HEAD, LIQUID JET DEVICE, AND METHOD FOR MANUFACTURING LIQUID JET HEAD

• Main Author: NAKAYAMA MASAO
• Format: Patent
• Language: English; Japanese
• Published: 24.09.2015
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a liquid jet head, a liquid jet device, and a method for manufacturing the liquid jet head that reduce breakage at an end portion of an active part.SOLUTION: A liquid jet head comprises: a flow channel formation substrate 10 in which a plurality of pressure generation chambers 12 are arranged in parallel; and a piezoelectric element 300 which includes a first electrode 60 disposed on the flow channel formation substrate 10, a piezoelectric layer 70 disposed on the first electrode 60, and a second electrode 80 disposed on the piezoelectric layer 70. The piezoelectric element 300 includes an active part 310 interposed between the first electrode 60 and the second electrode 80. The second electrode 80 is a common electrode disposed continuously in a juxtaposition direction of the pressure generation chambers 12 across a plurality of active parts 310, and its end portion in a direction intersecting the juxtaposition direction forms an end portion of the active part 310. At least the end portion of the second electrode 80 forming the active part 310 is subjected to plasma treatment in an atmosphere containing reductive gas. 【課題】能動部端部での破壊を低減した液体噴射ヘッド、液体噴射装置、液体噴射ヘッドの製造方法を提供する。【解決手段】圧力発生室１２が複数並設された流路形成基板１０と、流路形成基板１０に設けられる第１電極６０、第１電極６０に設けられた圧電体層７０、及び圧電体層７０に設けられた第２電極８０を具備する圧電素子３００と、を備え、圧電素子３００は、第１電極６０と第２電極８０とで挟まれた能動部３１０を具備し、第２電極８０は、複数の能動部３１０に亘って圧力発生室１２の並設方向に連続して設けられた共通電極であり且つ並設方向と交差する方向の端部が能動部３１０の端部を形成しており、第２電極８０の少なくとも能動部３１０を形成する端部は、還元性ガスを含む雰囲気下でのプラズマ処理が施されている。【選択図】図３