HUMIDITY SENSOR

PROBLEM TO BE SOLVED: To provide a humidity sensor which can be reduced in size and also number of components.SOLUTION: A cap 90 which surrounds a portion covering detection electrodes 41, 42 in a moisture sensitive film 60 is directly arranged on a sensor chip 10. A through hole 103 in which a spac...

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Bibliographic Details
Main Authors MURATA MINORU, NAGAO TAKASHIGE, ABE RYUICHIRO, YOKURA HISANORI, FURUICHI TAKAMOTO
Format Patent
LanguageEnglish
Japanese
Published 07.09.2015
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a humidity sensor which can be reduced in size and also number of components.SOLUTION: A cap 90 which surrounds a portion covering detection electrodes 41, 42 in a moisture sensitive film 60 is directly arranged on a sensor chip 10. A through hole 103 in which a space between the sensor chip 10 and the cap 90 communicates with an external space and which has such a size that liquid is blocked while vapor is allowed to come through is formed in the cap 90. 【課題】小型化を図ることができると共に、部品点数の削減を図ることのできる湿度センサを提供する。【解決手段】センサチップ１０に、感湿膜６０のうちの検出電極４１、４２を覆う部分を囲むキャップ９０を直接配置する。そして、キャップ９０に、センサチップ１０とキャップ９０との間の空間と外部空間とを連通し、水蒸気を透過しつつ、液体を遮断する大きさとされた貫通孔１０３を形成する。【選択図】図１
Bibliography:Application Number: JP20140037227