ECCENTRICITY ADJUSTMENT APPARATUS

• Main Authors: OKUHIGASHI YUKI, TAKEDA HOMARE, IWATA MASAKI
• Format: Patent
• Language: English; Japanese
• Published: 03.09.2015
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

PROBLEM TO BE SOLVED: To provide an eccentricity adjustment apparatus capable of performing highly accurate eccentricity quantity adjustment of a unit of several μm even when measurement frequency and positioning frequency are less.SOLUTION: The eccentricity adjustment apparatus includes: a scale disk pressing mechanism 6 which when adjusting eccentricity quantity of a scale disk 1 from a boss 2 in fixing of the scale disk 1 on the boss 2, presses the scale disk 1 on the opposite side to the side where the scale disk 1 is fixed on the boss 2; a mechanism for measuring the eccentricity quantity of the scale disk 1 from the boss 2 and an eccentric direction; and an adjustment head 11 arranged on a movable stage 13 to adjust the eccentricity quantity of the scale disk 1 by pressing the outside of the scale disk 1, in which load for pressing the scale disk 1 by the scale disk pressing mechanism 6 is set so that the scale disk 1 is not deviated from the boss 2 due to centrifugal force following the eccentricity of the scale disk 1. 【課題】計測回数及び位置調整回数が少なくても数μｍ単位の高精度な偏芯量調整ができる偏芯調整装置を提供する。【解決手段】ボス２にスケール円板１を固定する際、スケール円板１のボス２に対する偏芯量を調整する場合、スケール円板１のボス２が固定される側とは反対側においてスケール円板１を押さえ付けるスケール円板押さえ機構６と、スケール円板１のボス２に対する偏芯量及び偏芯方向を計測する機構と、移動可能なステージ１３上に配置されるとともにスケール円板１の外側を押すことによりスケール円板１の偏芯量を調整する調整ヘッド１１を設け、スケール円板１の偏芯に伴う遠心力により、スケール円板１がボス２に対してずれないように、スケール円板押さえ機構６によるスケール円板１を押付ける荷重を設定する。【選択図】図１