LOAD PORT DEVICE

• Main Authors: EMOTO ATSUSHI, IWAMOTO TADAMASA
• Format: Patent
• Language: English; Japanese
• Published: 03.08.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To prevent an increase in partial pressure of oxidizing gas with time elapse inside a FOUP (Front-Opening Unified Pod) which is fixed to a FIMS (Front-Opening Interface Mechanical Standard) system and put in an open state.SOLUTION: A gas supply port is arranged on a lower surfa...