COATING COMPOSITIONS FOR USE WITH OVERCOATED PHOTORESIST

• Main Authors: KONG LIU, ONGAYI OWENDI, WAYTON GERALD B, JAIN VIPUL, COLEY SUZANNE, ZAMPINI ANTHONY
• Format: Patent
• Language: English; Japanese
• Published: 27.07.2015
• Subjects: ADHESIVES; APPARATUS SPECIALLY ADAPTED THEREFOR; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; CHEMICAL PAINT OR INK REMOVERS; CHEMISTRY; CINEMATOGRAPHY; COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS; COMPOSITIONS BASED THEREON; CORRECTING FLUIDS; DYES; ELECTROGRAPHY; FILLING PASTES; HOLOGRAPHY; INKS; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PAINTS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; POLISHES; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; THEIR PREPARATION OR CHEMICAL WORKING-UP; TRANSPORTING; USE OF MATERIALS THEREFOR; WOODSTAINS

PROBLEM TO BE SOLVED: To provide coating compositions as an undercoat of an overcoated photoresist useful for mitigating deterioration in resolution of patterned images caused by reflection of activating radiation used to expose the photoresist.SOLUTION: An undercoating composition comprises a resin containing cyanurate groups and hydrophobic groups originating from a compound represented by the formula (I). The undercoating composition can enhance resolution of an overcoated photoresist relief image. 【課題】フォトレジストを露光するのに使用される活性化放射線の反射によるパターン形成される像の解像度の低下を減らすために有用な上塗りフォトレジストの下地としてコーティング組成物の提供。【解決手段】式（Ｉ）で表わされる化合物に由来するシアヌラート基及び疎水性基を含む樹脂を含有する下地コーティング組成物。当該コーティング組成物は上塗りフォトレジストレリーフ像の解像度を向上させることができる下地コーティング組成物。【選択図】なし