SYSTEMS AND METHODS FOR MEASUREMENT OR ANALYSIS OF SPECIMEN

• Main Authors: ZHAO QIANG, FIELDEN JOHN, LI XING, KAACK TORSTEN, TAN ZHENGQUAN, JANIK GARY, YOO SUNGCHUL
• Format: Patent
• Language: English; Japanese
• Published: 09.07.2015
• Subjects: BASIC ELECTRIC ELEMENTS; COLORIMETRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; RADIATION PYROMETRY; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To develop systems and methods for optical tools that are designed to use light that is at least partially absorbed by air and that have more efficient purging systems.SOLUTION: A method for measurement of a specimen comprises: measuring reflectometric data and spectroscopic ellipsometric data of the specimen; determining, from the reflectometric data, the thickness of a nitrided oxide gate dielectric formed on the specimen; determining the index of refraction of the nitrided oxide gate dielectric from the thickness and from the spectroscopic ellipsometric data; and determining the nitrogen concentration of the nitrided oxide gate dielectric from the index of refraction. 【課題】空気によって少なくとも部分的に吸収される光を使用するよう設計され、かつ、より能率的なパージングシステムを有する、光学ツールのための方法を開発する。【解決手段】試験体の測定のための方法において、該試験体の反射率測定データおよび分光偏光解析データを測定する工程と、該反射率測定データから、該試験体上に形成された窒化酸化物ゲート誘電体の厚さを判定する工程と、該厚さおよび該分光偏光解析データから、窒化酸化物ゲート誘電体の屈折率を判定する工程と、該屈折率から、該窒化酸化物ゲート誘電体の窒素濃度を判定する工程と、を含む。【選択図】 図１６