FUNCTION ELEMENT, ACCELERATION SENSOR, AND SWITCH

• Main Authors: HASHIMOTO MITSUO, AKIBA AKIRA, FUKUYAMA MUNEKATSU
• Format: Patent
• Language: English; Japanese
• Published: 06.07.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a function element capable of realizing the miniaturization and the voltage-lowering while retaining an impact resistance.SOLUTION: A function element (an MEMS device) comprises: a base plate; and a movable part held on the base plate and made movable along a first direction in the substrate face. The movable part has a plurality of first axial parts having a relatively high rigidity, and the first axial parts are arranged to extend individually along a first direction and in parallel for axial symmetry. On the substantial extensions of the first axial parts, there are provided protrusions for braking the movable parts. 【課題】衝撃耐性を確保しつつ、小型化および低電圧化を実現可能な機能素子を提供する。【解決手段】機能素子（ＭＥＭＳデバイス）は、基板と、基板に保持されると共に、基板面内の第１の方向に沿って移動可能な可動部とを備える。可動部は、相対的に高い剛性を有する複数の第１の軸部分を有し、複数の第１の軸部分は、それぞれが第１の方向に沿って延在すると共に、互いに線対称となるように並行して配置される。第１の軸部分の略延長線上に、可動部を制動する突起が設けられている。【選択図】図１