MIXER, SUBSTRATE TREATMENT APPARATUS, AND MIXING METHOD

• Main Authors: TANAKA KOJI, SUNAKA IKUO, MAEZONO TOMIYASU, SATO TAKAZO, UNO TAKASHI, MARUYAMA HIROTAKA, KAMIKO HIDETOMO, MIZUMOTO KAZUTAKA, KIYOHARA YASUO
• Format: Patent
• Language: English; Japanese
• Published: 02.07.2015
• Subjects: MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To improve accuracy of a mix proportion.SOLUTION: A mixer according to an embodiment includes a mixing tank, a first opening/closing valve, a second opening/closing valve, a first flow rate measuring part, a second flow rate measuring part, and a control part. In the mixing tank, a first liquid and a second liquid of an amount larger that of the first liquid are mixed. The first opening/closing valve and the second open/closing valve open and close a first flow channel and a second flow channel. The first flow rate measuring part and the second flow rate measuring part measure flow rates of the first liquid and the second liquid. The control part executes a first closing process for closing the first opening/closing valve when an integrated value of the flow rate of the first liquid measured by the first flow rate measuring part reaches a targe value, calculates a target value of a supply amount of the second liquid based on an integrated value of the flow rate of the first liquid at times before and after closing of the first opening/closing valve is completed, and executes a second closing process for closing the second opening/closing valve based on integrated values of the calculated target value and the flow rate of the second liquid measured by the second flow rate measuring part. 【課題】混合比率の精度を向上させること。【解決手段】実施形態に係る混合装置は、混合槽と第１開閉弁と第２開閉弁と第１流量計測部と第２流量計測部と制御部とを備える。混合槽では、第１液と第１液よりも多量の第２液とが混合される。第１開閉弁および第２開閉弁は、第１流路および第２流路を開閉する。第１流量計測部および第２流量計測部は、第１液および第２液の流量を計測する。制御部は、第１流量計測部によって計測された第１液の流量の積算値が目標値に達した場合に、第１開閉弁を閉じる第１閉処理を実行し、第１開閉弁が閉まりきる前後における第１液の流量の積算値に基づき第２液の供給量の目標値を算出し、算出した目標値と第２流量計測部によって計測された第２液の流量の積算値とに基づき、第２開閉弁を閉じる第２閉処理を実行する。【選択図】図５