RADICAL SOURCE
PROBLEM TO BE SOLVED: To provide a radical source capable of generating high-density radicals.SOLUTION: A radical source includes a gas supply tube 10 comprising SUS and a cylindrical plasma generation tube 11 connected to the gas supplying tube 10 and comprising pyrolytic boron nitride (PBN). The r...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
11.06.2015
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Subjects | |
Online Access | Get full text |
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