TRANSFER DEVICE

• Main Authors: YASUDA TAKAAKI, OTA KENSAKU
• Format: Patent
• Language: English; Japanese
• Published: 04.06.2015
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a transfer device which transfers a substrate to a wire cassette while inhibiting the occurence of vibrations of an arm.SOLUTION: A transfer device 100 includes an arm 101 which takes a substrate 300 into/out from a wire cassette 200. The transfer device 100 includes: a base plate 110 which is disposed extending in a horizontal direction and has an elongated plate shape; a hollow first reinforcement member 111 which extends along a longitudinal direction of the base plate 110 and is joined to an upper surface part of the base plate 110 at a width direction end part of the base plate 110; and a first top plate 121 which is joined to an upper surface part of the first reinforcement member 111 and has an elongated plate shape. The transfer device 100 further includes multiple support members 103 which are disposed in an area located above the base plate 110 and at the lateral side of the first reinforcement member 111, support the substrate 300, and may protrude and retract. 【課題】アームの振動の発生を抑制しつつワイヤカセットに基板を移載できる移載装置の提供。【解決手段】ワイヤカセット２００に対して、基板３００を出し入れするアーム１０１を備えた移載装置１００であって、水平方向に延びて配置される長尺板状のベースプレート１１０と、ベースプレート１１０の長手方向に沿って延び、ベースプレート１１０の幅方向の端部においてベースプレート１１０の上面部に接合される中空の第一補強部材１１１と、第一補強部材１１１の上面部に接合される長尺板状の第一トッププレート１２１とを備え、ベースプレート１１０の上方であって前記第一補強部材１１１の側方に配置され、基板３００を支持する出没可能な複数の支持部材１０３を備える。【選択図】図５