TRANSFER DEVICE

• Main Authors: YASUDA TAKAAKI, OTA KENSAKU
• Format: Patent
• Language: English; Japanese
• Published: 04.06.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a transfer device that is able to transfer a base plate to a wire cassette while restricting occurrence of arm vibration.SOLUTION: A loading device 100 for placing a base plate 300 into a wire cassette 200 and placing it out from the wire cassette 200 comprises: a long arm 101 arranged so as to extend in a horizontal direction; a plurality of support means 103 arranged in a line in the longitudinal direction of the arm 101, and extended/retracted between a support position for supporting the base plate 300 and a retraction position located below a wire 201 on which the base plate 300 is placed; first drive means 141 for extending/retracting a first support mean group 131 formed from some of the support means 103; second drive means for extending/retracting a second support mean group 132 formed from another some of the support means 103; and a control section that controls the first and second drive means 141, 142. 【課題】アームの振動の発生を抑制しつつワイヤカセットに基板を移載できる移載装置の提供。【解決手段】ワイヤカセット２００に対して基板３００を出し入れする移載装置１００であって、水平方向に延びて配置される長尺状のアーム１０１と、アーム１０１の長手方向に一列に並んで配置され、基板３００を支持する支持位置と基板３００が載置されるワイヤ２０１の下方に位置する回避位置との間で出没する複数の支持手段１０３と、複数の支持手段１０３の一部である第一支持手段群１３１を出没させる第一駆動手段１４１と、複数の支持手段１０３の他の一部である第二支持手段群１３２を出没させる第二駆動手段１４２と、第一駆動手段１４１、および、第二駆動手段１４２を制御する制御部とを備える。【選択図】図５