PLATE-LIKE BODY POLISHING DEVICE, PLATE-LIKE BODY POLISHING METHOD, AND PLATE-LIKE BODY MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a plate-like body polishing device, a plate-like body polishing method, and a plate-like body manufacturing method capable of equalizing variations in unevenness of polishing lines locally generated on a surface of a plate-like body to improve flatness over an entire...

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Bibliographic Details
Main Authors KAWACHI TATSURO, ISHIMARU NAOHIKO, SHIROYAMA ATSUSHI
Format Patent
LanguageEnglish
Japanese
Published 28.05.2015
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Summary:PROBLEM TO BE SOLVED: To provide a plate-like body polishing device, a plate-like body polishing method, and a plate-like body manufacturing method capable of equalizing variations in unevenness of polishing lines locally generated on a surface of a plate-like body to improve flatness over an entire surface of the plate-like body.SOLUTION: Polishing tools 22 of a polishing device 20 are configured to be a diameter D1 smaller than a width W of a glass plate G, and polish a surface of the glass plate G while being rotated and revolved. The polishing tools 22 are disposed to be a pair relative to a movement center line L of the glass plate G and disposed zigzag to be shifted along a movement direction, and each of the polishing tools 22 crosses the movement center line L to polish the glass plate G. A pair of the polishing tools 22 is configured to be a polishing tool unit 24. Positions of revolution axes P4 of polishing tools 22A, 22B of a polishing tool unit 24A at a rearmost row are shifted to a position of a revolution axis P4 of each of the polishing tools 22, 22 of the other polishing tool unit 24 to the movement direction of the glass plate G. 【課題】本発明は、板状体の表面に局所的に発生する研磨筋の凹凸のばらつきを均一化させて、板状体の表面全面における平坦度を向上させる板状体の研磨装置、板状体の研磨方法、及び板状体の製造方法を提供する。【解決手段】研磨装置20の研磨具22は、ガラス板Gの幅Wよりも小さい直径D1で構成され、自転され、かつ公転されながらガラス板Gの表面を研磨する。研磨具22は、ガラス板Gの移動中心線Lを基準として対を成して配置され、移動方向に沿って位置をずらした千鳥状に配置され、各々の研磨具22が移動中心線Lを越えてガラス板Gを研磨する。対を成す一対の研磨具22が研磨具ユニット24として構成される。最後列の研磨具ユニット24Aの研磨具22A、22Bの公転軸P4の位置が、ガラス板Gの移動方向に対する他の研磨具ユニット24の各研磨具22、22の公転軸P4の位置に対してずらされる。【選択図】図1
Bibliography:Application Number: JP20130239733