MEMBER HAVING CONDUCTIVE PROTECTIVE COATING FILM AND MANUFACTURING METHOD OF THE SAME

• Main Authors: KITA HIROAKI, NAKAMORI HIDEKI, ASAKURA MIKIO, TAKAZAWA REIKO, HIRATSUKA MASANORI, YAMAGUCHI TAKAYUKI, KAWAMOTO TOMOHIRO, NAGASAWA DAISUKE
• Format: Patent
• Language: English; Japanese
• Published: 07.05.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a member which has a protective coating film which has high hardness, an excellent wear resistance, and an excellent conductivity, is used for a manufacturing apparatus of a precision electronic part or the like, and can prevent a scratch, deflection, electrical charging caused by holding and transporting a product, and a manufacturing method of the member.SOLUTION: In a member having a conductive protective coating film on a metal substrate surface, the conductive protective coating film is a diamond-like carbon which has a film thickness of 0.1-3.0 μm, a refractive index n of 1.5-2.3 and an extinction coefficient k of 0.5-1.0 which are measured by spectroscopic ellipsometry, an indentation hardness of 5000-20000 MPa, a comparative abrasion quantity of 10m to 10m/N, and a resistivity of 10-10 cm. 【課題】高硬度、優れた耐摩耗性、及び良好な導電性を兼ね備えた保護被膜を有する部材であって、精密電子部品用製造装置等に用いられ、製品の保持及び運搬による、傷、たわみ、及び帯電を抑制可能な部材及びその製造方法を提供する。【解決手段】金属基板の表面に導電性保護被膜を有する部材であって、導電性保護被膜は、膜厚が０．１〜３．０μｍ、分光エプリソメトリ法を用いた測定における屈折率ｎが１．５〜２．３、消衰係数ｋが０．５〜１．０、インデンテーションハードネスが５０００〜２００００ＭＰａ、比摩耗量が１０−１５ｍ〜１０−１７ｍ２／Ｎ、抵抗率が１０〜１０６ ・ｃｍであるダイヤモンドライクカーボンであること、を特徴とする部材。【選択図】図１